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Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas
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10.1063/1.4751984
/content/aip/journal/apl/101/11/10.1063/1.4751984
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/11/10.1063/1.4751984
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental measurements: positive ion and electron density (a)and light emission intensity (b) versus gap length, in Ar (black) and (red lines) discharges, at a fixed HF and LF power of 30 W and 100 W, respectively. All measurements are conducted at the center of the discharge gap. The light emission is detected for the Ar line at 811.5 nm and divided by the average intensity. Note that the pressure increases from 1.3 Pa in Ar to 4.0 Pa to sustain the discharge.

Image of FIG. 2.
FIG. 2.

PIC MCC simulation results obtained for 2 HF periods: spatiotemporal ionization rates ((a1) and (b1)), electric field inside the bulk and the trajectory (black solid line) of a typical bouncing electron ((a2) and (b2)), and its kinetic energy ((a3) and (b3)). The figures (a) and (b) correspond to Ar and , respectively. The HF and LF voltage are 75 V, the electrode gap is 2 cm, and the pressure is 1.3 Pa in Ar and 2.7 Pa in . Note that in figures (a2) and (b2), the thick blue and red dashed arrows indicate the direction of the electric field inside the bulk and the thin dashed black lines indicate the zero electric field contour line, to indicate where the bulk electric field changes direction.

Image of FIG. 3.
FIG. 3.

Experimental measurements in the plasma: (a) relative ion density and (b) emission intensity (Ar line: 811.5 nm) at the discharge center versus L, at a range of HF powers for a fixed LF power of 100 W, at a gas pressure of 4.0 Pa. Note that the measured positive ion density has only relative values, because the ion Bohm velocity needs to be corrected according to the electronegativity in the sheath.

Image of FIG. 4.
FIG. 4.

PIC MCC simulation results obtained for 2 HF periods in the plasma at (a), 75 V (b), and 50 V (c): spatiotemporal ionization rates ((a1), (b1), and (c1)), electric field inside the bulk and the trajectory (black solid line) of a typical bouncing electron ((a2), (b2), and (c2)), and its energy ((a3), (b3), and (c3)). The electrode gap is 2 cm, the LF voltage is 50 V, and the pressure is 4.0 Pa. Note that in figure (a2), (b2), and (c2), the thick blue and red dashed arrows indicate the direction of the electric field inside the bulk and the thin dashed black lines indicate the zero electric field contour line.

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/content/aip/journal/apl/101/11/10.1063/1.4751984
2012-09-10
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/11/10.1063/1.4751984
10.1063/1.4751984
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