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Process for fabricating a toroidal microcavity.
(a) Optical microscopic images of a disk cavity to form an octagonal silicon post. (b) Optical microscope image of a disk cavity when KOH etching is performed for 4 h 30 min. and without isotropic etching. (c) Scanning electron microscope image of a fabricated octagonal toroidal microcavity after the laser reflow.
(a) Structure and dimensions of the octagonal toroidal microcavity used for the calculation. The cavity radius r is 50 μm, and the cavity rim width w is 10 μm. The vertex curvature and the side length of the polygon are r p = 38.1 μm and s = 10 μm, respectively. The effective refractive index of the SiO2 at the rim is n 1 = 1.44 and that of the remaining part is n 2 = 1.3 assuming a 1 μm thick slab. (b) The resonance spectrum of the octagonal silica toroidal microcavity shown in (a). (c) H z-field profile of an octagonal toroidal microcavity. The inset shows a close-up of the mode profile at the corner and the side of the octagon.
(a) Calculated mode profiles for an octagonal toroidal microcavity (shown in Fig. 3(a)) with a tapered fiber differently touched to the surface. The diameter of the tapered fiber is 1 μm. The refractive index of the fiber is 1.3 assuming a 1 μm thick fiber. (b) Coupling coefficient κ with respect to d for a circular cavity with r = 20 μm and for an octagonal cavity with two different coupling configurations. Square, round, and triangular dots show κ for a circular cavity, parallel coupling ((a) left) and corner coupling ((a) right), respectively.
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