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Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
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10.1063/1.4754692
/content/aip/journal/apl/101/12/10.1063/1.4754692
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/12/10.1063/1.4754692
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of the DRACULA plasma reactor, showing the Hiden Mass Spectrometer (A), ion flux probe array (B), hairpin resonator probe (C), SOLAYL VI probe (D), blocking capacitor (4.5 nF; E), rf power generator (F), function generator (G), dielectric spacers between the powered and grounded electrodes (H), and high-voltage probe (I). (b) Measured voltage waveforms on the powered electrode for a 3 harmonic peaks (solid curve) and valleys (dashed curve) waveform.

Image of FIG. 2.
FIG. 2.

(a) Electron density and (b) dc bias, as a function of the number of applied harmonics. The pressure is 50 mTorr, and the applied voltage is 100 V peak-to-peak. The closed triangles are for peaks waveforms, while the closed upside-down triangles are for valleys waveforms.

Image of FIG. 3.
FIG. 3.

(a) Ion current density on the grounded electrode as a function of radial distance for a single frequency sinusoidal waveform (closed circles), a 4 harmonic peaks waveform (closed triangles), and a 4 harmonic valleys waveform (closed upside-down triangles). The vertical dashed lines mark the radial boundaries, while the dashed-dotted line indicates the central axis of DRACULA. The pressure is 50 mTorr, and the applied voltage is 100 V peak-to-peak. (b) Ratio of the valleys-to-peaks ion flux at the center of the grounded electrode as a function of the number of applied harmonics.

Image of FIG. 4.
FIG. 4.

(a) IF-DFs on the grounded electrode for peaks and valleys waveforms at 20 mTorr and an applied voltage of 100 V peak-to-peak. (b) Average ion energy on the grounded electrode for peaks (dashed curves and closed triangles) and valleys (solid curves and closed upside-down triangles) at pressures of 20 mTorr, 50 mTorr, and 90 mTorr. The applied voltage is 100 V peak-to-peak.

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/content/aip/journal/apl/101/12/10.1063/1.4754692
2012-09-21
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Separate control of the ion flux and ion energy in capacitively coupled radio-frequency discharges using voltage waveform tailoring
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/12/10.1063/1.4754692
10.1063/1.4754692
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