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Magnetic hysteresis curves measured by SQUID at room temperature. (a) Sample set (I) and (b) sample set (II).
Cross section TEM image and SAED pattern for sample: (a) “Mn-800 (I);” (b) “Mn-800-He (I);” and (c) “Mn-800-He (II).” The arrow in figure (b) indicates the interface between the top amorphous layer and the 75 nm damaged underlayer.
Cross-section HRTEM image of the 75 nm damaged EOR region in sample “Mn-800-He (I).” The ellipses marked subareas are undamaged. Broken lines on the top left margin mark the boundary between the damaged underlayer and the top amorphous layer.
Magnetic hysteresis curves measured by SQUID at room temperature, for sample “Mn-800-He (I)” after etching. Similar result was obtained at low temperature.
XPS spectra of sample “Mn-800-He (I)” after 325 nm etching. The inset shows the spectra around Mn 2 p states.
Mn concentration profiles for Si1−xMnx DMS sample set (I), by SIMS.
Grazing incident x-ray diffraction for Si1−xMnx DMS sample set (I).
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