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SEM photos of our fabricated textured structures, where (a) shows the octagonal cone tips inside inverted pyramidal structures and (b) is its zoom in, and (c) shows the inverted pyramidal structures (PERL) and (d) is its zoom in.
(a) Three-dimensional view and (b) cross view of unit structure with the tip inside one unit of the inverted pyramidal structures, where w is the width of the structure, t is the thickness of the silicon material, the angle 54.74° is between the faces of the inverted pyramid and the x-y plane, h is the height from the bottom of the inverted pyramid to the top of the tip, H is the depth of the inverted pyramid structure, Φ = 71.4° is the angle between the edges of the tip and the x-y plane.
The measured reflectivities (solid lines) and simulated reflectivities (dashed lines) verse wavelength for the cases of bare Si, inverted pyramidal structures (PERL), and inverted pyramidal structures with the tips. The flat surfaces surrounding the unit structure are not considered in the simulation results.
Top view of the reflection for two different structures, where (a) is the inverted pyramidal structures (PERL) and (b) is the inverted pyramidal structures with the tips. The areas marked by the blue, red, green, and yellow colors are for the twice, three times, four times, and five times or more than five times light reflection before the light reflects back to the air.
Percentage of reflection areas for inverted pyramidal structures without and with the tips.
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