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(a) Micrograph of one of the devices fabricated (L = 500 μm, W = 125 μm). (b) Devices schematic. (c) Calculated in-plane modal displacement and cross section used in 2D FSI simulations.
Impedance measurements of one of the resonators (L = 500 μm, W = 250 μm) in (a) air and (b) water. The insets show the optically measured in-plane displacement at the conductance peaks (enhanced online). [URL: http://dx.doi.org/10.1063/1.4758470.1]10.1063/1.4758470.1
Evolution of the Q-factor in isopropanol versus the length L for two different thicknesses H, obtained by analytical modeling and FEM simulation. Experimental data are also plotted for the devices fabricated (H = 20 μm).
Measurements in different liquids for a device of L = 1000 μm and W = 125 μm. (a) Conductance versus frequency, vertical offsets were applied to each curve for clarity purposes. The Q-factor is also indicated in the legend. (b) Evolution of the Q-factor as a function of the density and viscosity of the liquid under test.
Experimental Q-factors of the first extensional mode of devices with different dimensions in air and isopropanol. Calculated Q-factors determined by the analytical model and FEM simulation in isopropanol. The thickness (H) is 20 μm for all the cases.
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