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Degenerate crystalline silicon films by aluminum-induced crystallization of boron-doped amorphous silicon
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10.1063/1.4759151
/content/aip/journal/apl/101/15/10.1063/1.4759151
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/15/10.1063/1.4759151
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Optical micrographs of the glass/film interface after annealing for the boron-doped AIC-Si and undoped AIC-Si.

Image of FIG. 2.
FIG. 2.

Crystalline fraction calculated from Raman spectra for the boron-doped AIC-Si and undoped AIC-Si. Inset is their coverage percentage.

Image of FIG. 3.
FIG. 3.

XRD patterns for as-deposited boron-doped a-Si and boron-doped AIC-Si annealed at various times.

Image of FIG. 4.
FIG. 4.

SIMS plots of (a) as-deposited boron-doped a-Si and (b) boron-doped AIC-Si annealed for 1 h, as well as (c) 10 h.

Image of FIG. 5.
FIG. 5.

A model proposed to explain the mechanism of boron-doped AIC-Si.

Image of FIG. 6.
FIG. 6.

Resistivity and carrier concentration for the boron-doped AIC-Si and undoped AIC-Si.

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/content/aip/journal/apl/101/15/10.1063/1.4759151
2012-10-11
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Degenerate crystalline silicon films by aluminum-induced crystallization of boron-doped amorphous silicon
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/15/10.1063/1.4759151
10.1063/1.4759151
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