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(a) SEM image of diamond-on-insulator cross section. Horizontal layers from top to bottom: 1.15 μm single-crystal diamond/1.02 μm SiO2/ 500 μm Si. (b) SEM of patterned and etched single-crystal diamond cantilevers lying atop SiO2. (c) Released single-crystal diamond cantilever suspended over Si. (d) Optical image of suspended diamond cantilevers.
Cantilever M7 mechanical properties: (a) Cantilever motional amplitude as a function of drive frequency. (b) Cantilever mechanical ringdown at room temperature.
Temperature dependence of mechanical quality factors for three cantilevers: M2 (red squares), M4 (blue circles), M7 (black triangles). Error bars are smaller than the marker size.
Room temperature quality factor, resonant frequency, and dimensions of eight fabricated single-crystal diamond cantilevers.
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