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High quality factor single-crystal diamond mechanical resonators
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10.1063/1.4760274
/content/aip/journal/apl/101/16/10.1063/1.4760274
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/16/10.1063/1.4760274

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of diamond-on-insulator cross section. Horizontal layers from top to bottom: 1.15 μm single-crystal diamond/1.02 μm SiO2/ 500 μm Si. (b) SEM of patterned and etched single-crystal diamond cantilevers lying atop SiO2. (c) Released single-crystal diamond cantilever suspended over Si. (d) Optical image of suspended diamond cantilevers.

Image of FIG. 2.
FIG. 2.

Cantilever M7 mechanical properties: (a) Cantilever motional amplitude as a function of drive frequency. (b) Cantilever mechanical ringdown at room temperature.

Image of FIG. 3.
FIG. 3.

Temperature dependence of mechanical quality factors for three cantilevers: M2 (red squares), M4 (blue circles), M7 (black triangles). Error bars are smaller than the marker size.

Tables

Generic image for table
Table I.

Room temperature quality factor, resonant frequency, and dimensions of eight fabricated single-crystal diamond cantilevers.

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/content/aip/journal/apl/101/16/10.1063/1.4760274
2012-10-18
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High quality factor single-crystal diamond mechanical resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/16/10.1063/1.4760274
10.1063/1.4760274
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