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(a)–(c) SEM images of 3 different periodic honeycomb textures and (d)–(f) the surfaces of the 1-μm-thick μc-Si:H solar cells deposited on them. The periods of the substrates are (a) and (d) 1 μm, (b) and (e) 1.5 μm, and (c) and (f) 2 μm.
J-V parameters of 1-μm-thick μc-Si:H solar cells fabricated on honeycomb textures with periods of P = 1.4 μm or 1.5 μm as functions of the aspect ratio, H/P. The star symbols represent the results obtained with a wide-gap (p)nc-SiOX layer instead of the standard (p)μc-Si:H layer.
Relationship between the period of textured substrates and the J SC in n-i-p μc-Si:H cells with a thickness of 1 μm. Open circles represent data obtained with patterned Al substrates obtained by anodic oxidation of Al (see Ref. 14).
External quantum efficiency spectra of the μc-Si:H solar cells deposited on a flat substrate and a honeycomb texture with P = 1.5 μm and an optimum H/P.
Absorption spectra of the μc-Si:H cells fabricated on a flat and the honeycomb substrate with P = 1.5 μm. For the honeycomb substrate, the corresponding EQE spectrum is also plotted. Black arrows indicate the absorption peaks due to the Fabric-Perrot interference. The x axis is linearly proportional to the inverse of wavelength for better visibility.
J-V parameters of μc-Si:H cells fabricated on a flat and honeycomb textures with a period of 1.5 μm and aspect ratio of ∼0.23. All the cells have an active area of 1 cm2.
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