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Efficient and broadband polarization rotator using horizontal slot waveguide for silicon photonics
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10.1063/1.4734640
/content/aip/journal/apl/101/2/10.1063/1.4734640
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/2/10.1063/1.4734640
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Figures

Image of FIG. 1.
FIG. 1.

Schematic of the polarization rotator consisting of input waveguide, mode size converter, horizontal slot waveguide, polarization transition region, and final output channel waveguide. Insets (a)–(f) are mode profiles along the device when launching TM, respectively. The mode profiles are obtained through 3D-FDTD simulation using at 1550 nm wavelength. WG stands for waveguide.

Image of FIG. 2.
FIG. 2.

(a) Effective indices of the fundamental TE and TM modes of a SiO cladding slot waveguide (black line) and channel waveguide (red line) with different widths, respectively. Dashed lines indicated the chosen parameters satisfying the phase matching condition. Schematic of the key process steps (b) after top Si layer etching and (c) after bottom Si layer etching. The slot layer acted as an etch-stop layer to eliminate possible attack of the bottom Si. SEM images of (d) the mode size converter and (e) the polarization rotation region. Scale bars: 500 nm. Inset is a TEM image of the cross section at the indicated position.

Image of FIG. 3.
FIG. 3.

(a) Extinction ratio of devices with various rotating length from 10 to 500 m. Both TM and TE launching conditions were tested and output TM-TE rotation (red dot) and TE-TM rotation (black square) were measured. Input light wavelength is 1550 nm. (b) Measured polarization components when launching TM. TE is red line and remained TM is blue line. Dashed and dashed dotted lines are background noise TM-TE and reference Si waveguide TM-TM. (c) Measured polarization components when launching TE. TM is red line and remained TE is blue line. Dashed and dashed dotted lines are background noise TE-TM and reference Si waveguide TE-TE. The scanning wavelength is 1530 to 1600 nm.

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/content/aip/journal/apl/101/2/10.1063/1.4734640
2012-07-10
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Efficient and broadband polarization rotator using horizontal slot waveguide for silicon photonics
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/2/10.1063/1.4734640
10.1063/1.4734640
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