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Corrosion of Si-O based porous low-k dielectrics
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10.1063/1.4766336
/content/aip/journal/apl/101/20/10.1063/1.4766336
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/20/10.1063/1.4766336
/content/aip/journal/apl/101/20/10.1063/1.4766336
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/content/aip/journal/apl/101/20/10.1063/1.4766336
2012-11-13
2014-09-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Corrosion of Si-O based porous low-k dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/20/10.1063/1.4766336
10.1063/1.4766336
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