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Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
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10.1063/1.4766440
/content/aip/journal/apl/101/21/10.1063/1.4766440
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/21/10.1063/1.4766440
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of the fin structure with doping area. (b) TEM image of the fin structure.

Image of FIG. 2.
FIG. 2.

TEM images of the observed regions and 3D atom maps for each atom. Dashed lines indicate the (a) bottom region of the As-doped sample, (b) sidewall region of the As-doped sample, and (c) sidewall and corner regions of the P-doped sample.

Image of FIG. 3.
FIG. 3.

1D concentration profiles of Si, SiO2, and As in the (a) bottom and (b) sidewall regions of the As-doped samples. The selected region is indicated in each atom map.

Image of FIG. 4.
FIG. 4.

1D concentration profiles of Si, SiO2, and P in the (a) sidewall and (b) corner regions of the P-doped sample. The selected regions are indicated in the atom map.

Image of FIG. 5.
FIG. 5.

Maximum concentrations of the dopants, SiO2, and atomic O in different regions of the samples are plotted.

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/content/aip/journal/apl/101/21/10.1063/1.4766440
2012-11-21
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/21/10.1063/1.4766440
10.1063/1.4766440
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