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SEM picture of the micro Coriolis flow sensor.
Operating principle of a micro Coriolis mass flow sensor.
SEM picture of the interdigitated comb-fingers.
Cross-sectional view of the capacitive interdigitated fingers in the Coriolis flow sensor. The upper fingers are attached to the movable tube and the lower fingers are anchored to the substrate.
Measured edge displacement of the tube versus the pump amplitude with the pump frequency fixed at 1900 Hz.
Spectral displacement measurements when performing a frequency sweep for a pump amplitude of 50 V.
Flow measurements for a parametrically excited tube.
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