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XRD patterns for the excimer laser-annealed BST thin films, with various laser irradiation energies.
FESEM image of (a) crystallized BST thin films irradiated with a laser energy of 100 mJ/cm2, (b) surface morphology of BST thin film after one 100 mJ/cm2 pulse, (c) TEM image of BST thin films crystallized using a laser irradiation energy of 100 mJ/cm2, and HRTEM image with FFT analysis of (d) A region, (e) B region, and (f) C region.
Schematics of (a) MIM capacitor with out-of-plane capacitance and (b) planar type capacitor with in-plane capacitance, where the capacitors were made using a BST thin film crystallized using excimer laser annealing, (c) dielectric properties of MIM capacitors, and (d) dielectric properties and tunabilities of planar type capacitors.
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