1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Quantitative self-calibrating lock-in carrierographic lifetime imaging of silicon wafers
Rent:
Rent this article for
USD
10.1063/1.4772207
/content/aip/journal/apl/101/24/10.1063/1.4772207
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/24/10.1063/1.4772207
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

LIC amplitude and phase images of a Si wafer with mechanical back-side damage. Points A-C were selected for full PCR frequency scans.

Image of FIG. 2.
FIG. 2.

Comparison of the phase-frequency dependence between camera and single-element InGaAs detector. The modulation frequencies of the camera-based measurement were chosen to be 10 Hz, 50 Hz, 100 Hz, 200 Hz, 300 Hz, and 400 Hz.

Image of FIG. 3.
FIG. 3.

Lifetime map calculated from the phase-frequency dependence of six carrierographic images.

Loading

Article metrics loading...

/content/aip/journal/apl/101/24/10.1063/1.4772207
2012-12-12
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantitative self-calibrating lock-in carrierographic lifetime imaging of silicon wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/24/10.1063/1.4772207
10.1063/1.4772207
SEARCH_EXPAND_ITEM