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Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films
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10.1063/1.4773202
/content/aip/journal/apl/101/26/10.1063/1.4773202
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/26/10.1063/1.4773202
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Figures

Image of FIG. 1.
FIG. 1.

GISAXS scans of the iron-coated silicon sample irradiated at 200 eV between the irradiation times of (a) 0–920 s, (b) 900–1580 s, (c) 1580–3570 s, and (d) 3570–6200 s. The low qll values peaks (shoulders to the incident peak) indicate long-range correlated structures on the sample. Appearance and disappearance of the low qll value peaks indicate roughening and smoothing of the sample, respectively. The high qll value peaks in ((c) and (d)) and the low qll value peaks in (d) indicate the formation of correlated structures (nanodots).

Image of FIG. 2.
FIG. 2.

Scanning electron microscopy (SEM) image of the nanostructures formed at the end of the 6600-s irradiation of the iron-coated silicon sample.

Image of FIG. 3.
FIG. 3.

Comparison of the time evolution of the GISAXS intensity of the high qll value peak and Fe intensity (log-scale) of the real time XRF spectra (Fe-Kα) output of the iron-coated silicon sample irradiated with argon ions at normal incidence and 200 eV. The flux was about 2 × 1014 cm−2 s−1, and the irradiation was performed for 6600 s. Evolution of nanodots occurs through four stages as indicated.

Image of FIG. 4.
FIG. 4.

In-situ XPS results (Fe 3p peak), plotted as a function of fluence, of 10 nm Fe-coated silicon substrate irradiated with 200 eV argon.

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/content/aip/journal/apl/101/26/10.1063/1.4773202
2012-12-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Real time x-ray studies during nanostructure formation on silicon via low energy ion beam irradiation using ultrathin iron films
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/26/10.1063/1.4773202
10.1063/1.4773202
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