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Porous silicon micro- and nanoparticles for printed humidity sensors
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematic of the sensor design (a), where PSi particle solution is deposited on top of an interdigitated electrode configuration. Photograph of a drop-cast PSi sensor on a glass substrate (b). The inset displays an optical micrograph showing a silver electrode line and a layer of PSi particles on top. Some larger particle-agglomerates can clearly be distinguished from the sensing layer.

Image of FIG. 2.
FIG. 2.

Particle size distribution of the PSi particles, determined with dynamic light scattering.

Image of FIG. 3.
FIG. 3.

Sensor response to a step-wise relative humidity sweep ranging from 95 to 0 RH% (a), and the corresponding hysteresis curve determined from the measurement (b).

Image of FIG. 4.
FIG. 4.

Sensor response to RH modulation between 0% and 90% (a). Final humidity pulse to 95 RH% demonstrates that the sensitivity is well below 5 RH%, even for higher humidity values. Sensor response and the corresponding time constant , when RH content is raised from 0% to 90% (b). Time constant value is 36 s.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Porous silicon micro- and nanoparticles for printed humidity sensors