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Shear dependent nonlinear vibration in a high quality factor single crystal silicon micromechanical resonator
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10.1063/1.4737213
/content/aip/journal/apl/101/3/10.1063/1.4737213
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737213

Figures

Image of FIG. 1.
FIG. 1.

WG mode bulk resonator: (a) Circuit schematic of the electrical characterization configuration applied to device, (b) finite element (FE) simulation of the vibration mode shape, and (c) SEM image of the fabricated device.

Image of FIG. 2.
FIG. 2.

The ab initio simulations of shear deformation: (a) original silicon lattice; (b) silicon lattice under shear deformation; and (c) simulated shear stress-strain relation in the direction within the (100) plane.

Image of FIG. 3.
FIG. 3.

Measured and simulated frequency responses at 50 V DC bias when nonlinearity is negligible (RF power −10 dBm) and prominent (RF power 10 dBm).

Image of FIG. 4.
FIG. 4.

Measured frequency responses under various DC bias at fixed RF power (5 dBm). Inset: measured and simulated critical driving conditions of the device.

Tables

Generic image for table
Table I.

Extracted linear and higher-order shear coefficients of SCS along the direction within (100) plane.

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/content/aip/journal/apl/101/3/10.1063/1.4737213
2012-07-16
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Shear dependent nonlinear vibration in a high quality factor single crystal silicon micromechanical resonator
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737213
10.1063/1.4737213
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