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Tungsten silicide films for microwave kinetic inductance detectors
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10.1063/1.4737408
/content/aip/journal/apl/101/3/10.1063/1.4737408
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737408
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Transmission, S21, past a quarter wavelength CPW resonator of (a) 350 nm W5Si3 at Pint = −44.1 dBm with Fr = 4.7051 GHz, Qm = 2.30 × 104 and Qi = 1.76 × 105 and (b) 350 nm WSi2 at Pint = −39.3 dBm with Fr = 3.0296 GHz, Qm = 8.38 × 104 and Qi = 3.32 × 105. Measured data are shown with open circles and the line is a fit to the data using a skewed Lorentzian. Note the shift to lower frequencies due to large kinetic inductance fraction when compared to the geometric resonant frequencies of ∼6.18 GHz.

Image of FIG. 2.
FIG. 2.

Calculated phase shift as a function of photon energy for 1μm thick resonators with Qm = 104, Volume = 5 × 104μm3, and fr = 6 GHz using WSi2 (α = 0.75, *), W5Si3 (α = 0.43, ○), TiN (α = 0.75, □), Al (α = 0.05, ♦), and Ta (α = 0.01, ▪).

Image of FIG. 3.
FIG. 3.

Phase pulse from an Fe55 x-ray absorption in a 1 μm thick WSi2 resonator with Qm = 2 × 104 and α = 0.75. The pulse is smaller than calculated due to saturation of the detector at high phase deviations. The black line is semi-Gaussian fit to the data.

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/content/aip/journal/apl/101/3/10.1063/1.4737408
2012-07-18
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tungsten silicide films for microwave kinetic inductance detectors
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737408
10.1063/1.4737408
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