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Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
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10.1063/1.4737644
/content/aip/journal/apl/101/3/10.1063/1.4737644
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737644
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Figures

Image of FIG. 1.
FIG. 1.

An electrothermally activated micro-positioner using high-aspect-ratio micromachined polymer composite of silicon and SU-8 epoxy: (a) a scanning electron micrograph (SEM) of a micromachined chip of the micro-positioner with two thermal unimorphs (on the contact pad are residues of carbon adhesive for attaching the device on a sample holder of SEM); (b) a schematic drawing showing that activation of a thermal unimorph in the micro-positioner moves a slider on a flexural stage by a lateral stroke u(t); (c) photograph of a thermal unimorph, which consists of a comb-like silicon skeleton, a U-shape platinum heater, and transparent SU-8 polymer filling.

Image of FIG. 2.
FIG. 2.

Displacement of the slider, when driven by the micro-positioner, which has one of the two thermal unimorph activated by pulsed heating at a 50% duty cycle: (a) activation by a square voltage pulse with 4 V magnitude and 0.5 ms pulsewidth; (b) activation by a square voltage pulse with 4 V magnitude and 1 ms pulsewidth. (c) peak-to-peak stroke of the actuated slider as a function of pulsewidth and magnitude of a square voltage pulse. The time constants of the thermomechanical response are obtained by least-square fitting the experimental data using the exponential equations of time, as indicated besides the curve-fit lines.

Image of FIG. 3.
FIG. 3.

Temperatures of the two unimorphs, one activated under pulsed resistive heating and one inactivated. The temperatures are estimated from the resistance change of each heater: (a) temperature change of left heater (), right heater (), and their difference () over time under a 4 V and 6.1 ms voltage pulse; dependences of peak-to-peak temperature difference () on (b) pulsewidth and (c) voltage.

Image of FIG. 4.
FIG. 4.

Frequency response of the slider, which is actuated by two thermal unimorphs under alternate activation with a half-sine pulse. The in-plane motion of the slider is measured by a laser doppler vibrometer.

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/content/aip/journal/apl/101/3/10.1063/1.4737644
2012-07-18
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fast electrothermally activated micro-positioner using a high-aspect-ratio micro-machined polymeric composite
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/3/10.1063/1.4737644
10.1063/1.4737644
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