1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma
Rent:
Rent this article for
USD
10.1063/1.4733662
/content/aip/journal/apl/101/4/10.1063/1.4733662
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/4/10.1063/1.4733662

Figures

Image of FIG. 1.
FIG. 1.

Voltage and current over one power on phase.

Image of FIG. 2.
FIG. 2.

(a), (e) Space- and time- resolved optical emission profiles of the discharge with (a) Ipeak = 90 mA, (e) Ipeak = 120 mA. (b), (f) Space- and time-resolved electron generation (numerical result). (c), (g) Space- and time-electric field (v/cm, numerical result). (d), (h) Power absorbed by the electrons calculated as JeE (mW/cm3) from the simulation data. Here, Je is the electron current density and E is the electric field. (b)-(d) correspond tolow current case of (a), (f), (g), and (h) correspond to high current case of(e).

Image of FIG. 3.
FIG. 3.

Space- and time- resolved optical emission profiles (a) and numerical electron generation (e) of the discharge with Ipeak = 154 mA. Space- and time- resolved optical emission at 706 nm (experiment (b) and numerical result (e)), 777 nm (experiment (c) and numerical result (g)). Space- and time-resolved density profiles of He* (d) and He2* (h) (numerical result).

Image of FIG. 4.
FIG. 4.

Space and time averaged rate of O(5p1) reaction. Positive frequency means production reactions, and negative frequency means loss reactions.

Image of FIG. 5.
FIG. 5.

Photographs of S.au samples on cellulose membrane. Plasma working time is fixed at 10 s. Working gas of pure He and He + O2(1%) are used.

Tables

Generic image for table
Table I.

Reactions between He and O2 related with O(5p1).

Loading

Article metrics loading...

/content/aip/journal/apl/101/4/10.1063/1.4733662
2012-07-27
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/4/10.1063/1.4733662
10.1063/1.4733662
SEARCH_EXPAND_ITEM