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(a) XRD patterns of 300 keV Ne+ irradiated nanocrystalline ZrN showing peak shifts at different fluences. The vertical lines indicate the original peak position of the unirradiated sample. HRTEM images of (b) unirradiated and (c) Ne+ irradiated sample with a fluence of 5 × 1016 ions/cm2 (20dpa). After irradiation the grain size remained unchanged at ∼5 nm.
XRD patterns of 350 keV O+ irradiated nanocrystalline ZrN showing peak shifts at different fluences, with the vertical lines indicating the original peak position of the unirradiated sample.
Unit cell parameter (a) versus dpa curves for irradiation of nanocrystalline ZrN with 300 keV Ne+ (red) and 350 keV O+ (blue), indicating a close relationship between the lattice contraction and the displacement damage level.
RBS spectrum (black line) of nanocrystalline ZrN irradiated with 300 keV Ne+ (fluence 1 × 1016 ions/cm2 corresponding to 4 dpa) and simulation result using XRUMP code (red line) indicate a nitrogen deficiency (N:Zr = 0.88) within 490 nm depth from the surface.
Changes in ZrN unit cell parameter (a) at different Ne+ fluences (given in ions/cm2).
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