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Correlation between Ga-O signature and midgap states at the Al2O3/In0.53Ga0.47As interface
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10.1063/1.4745012
/content/aip/journal/apl/101/6/10.1063/1.4745012
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/6/10.1063/1.4745012
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Figures

Image of FIG. 1.
FIG. 1.

Typical frequency dependent C-V characteristics of Au/Ti/Al2O3/In0.53Ga0.47As gate stacks with different NH4OH pre-deposition treatment: (a) no pre-deposition treatment, (b) 18% NH4OH for 1 min, and (c) 36% NH4OH for 1 min.

Image of FIG. 2.
FIG. 2.

Near midgap interface states parameters of Au/Ti/Al2O3/In0.53Ga0.47As gate stacks with different NH4OH concentration pre-deposition treatment: (a) C-V hump area (Qhump) at 10 kHz and (b) near midgap Dit distribution.

Image of FIG. 3.
FIG. 3.

(a) As 3d normalized XPS spectra of the annealed Al2O3/InGaAs with different NH4OH concentration PDT and fitting of the standard sample spectra. The inset demonstrates the normalized spectra of the as deposited Al2O3/InGaAs with different NH4OH concentration pre-deposition treatments. (b) Ratio of As-As 3d related peak to As (InGaAs) 3d bulk peak intensities before and after PDA for different NH4OH concentration PDT.

Image of FIG. 4.
FIG. 4.

In 3d normalized XPS spectra of the annealed Al2O3/InGaAs with different NH4OH concentration PDT and fitting of the standard sample spectra. The inset demonstrates the normalized spectra of the as deposited Al2O3/InGaAs with different NH4OH concentration PDT.

Image of FIG. 5.
FIG. 5.

Ga 3d and In 4d normalized XPS spectra of Al2O3/InGaAs with different NH4OH concentrations PDT: (a) as deposited and (b) after PDA. Spectra fittings after PDA for (c) 36% PDT, (d) 18% PDT, and (e) standard samples.

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/content/aip/journal/apl/101/6/10.1063/1.4745012
2012-08-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Correlation between Ga-O signature and midgap states at the Al2O3/In0.53Ga0.47As interface
http://aip.metastore.ingenta.com/content/aip/journal/apl/101/6/10.1063/1.4745012
10.1063/1.4745012
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