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High-Q gold and silicon nitride bilayer nanostrings
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View: Figures


Image of FIG. 1.
FIG. 1.

False color scanning electron microscope (SEM) image of the long gold and silicon nitride (purple) bilayer nanostring (scale bar ). Inset is an overhead view (scale bar ). The gold layer is a wide strip atop the wide string.

Image of FIG. 2.
FIG. 2.

Q as a function of mode number for the long gold bilayer nanostring (orange circles are out-of-plane and blue triangles are in-plane) and a bare string of similar geometry (red squares) from Ref. 8. Here the string is actuated using the external piezoelectric. The blue and orange curves are fits to Eq. (1) with .

Image of FIG. 3.
FIG. 3.

(a) Relative frequency shift of the fundamental mode in vacuum (actuated with external piezoelectric) versus temperature as the entire sample stage is heated. (b) Fundamental out-of-plane mode actuated by the AC ohmic thermal effect. (c) Absolute frequency shift of the fundamental mode in vacuum versus applied voltage using AC ohmic actuation (red squares) and corresponding device resistance (blue circles). Fit (dashed grey curve) is to Eq. (6).

Image of FIG. 4.
FIG. 4.

(a) Frequency response of the first out-of-plane (lower frequency) and in-plane (higher frequency) modes in air using AC thermoelastic actuation (400 mV drive) with corresponding PSD fits (black) to extract the Q. (b) SEM of the gold bilayer nanostring after current induced failure at AC drive. Enough gold has come off the device to break the current path, resulting in insulating behavior. Scale bar is .


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-Q gold and silicon nitride bilayer nanostrings