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High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography
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10.1063/1.4774298
/content/aip/journal/apl/102/1/10.1063/1.4774298
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/1/10.1063/1.4774298
/content/aip/journal/apl/102/1/10.1063/1.4774298
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/content/aip/journal/apl/102/1/10.1063/1.4774298
2013-01-09
2014-09-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/1/10.1063/1.4774298
10.1063/1.4774298
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