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Scanning electron microscope image of a W1 HAR IDT ( ) with and (false colors). The copper seed layer used for electroplating and electrical conduction of the signal is shown in red, while the electroplated nickel appears in green. The plating was limited to the acoustical aperture length and to the IDT busbars. The reference frame (x,y,z) and crystallographic axes (X,Y,Z) are depicted as an inset.
(a) Measured electrical reflection as a function of frequency for two 50-finger-paired W1 HAR IDTs with and . (b) parameter measurements for two W2 HAR IDTs with and and 10 finger pairs. The vertical line at 109.4 MHz sets the position of the sound line that delimits the radiative area, here shaded in gray.
Out-of-plane mechanical displacement and the average displacement along HAR IDT for each mode of a W1 HAR IDT (w/2p = 1) with h/2p = 0.43 μm and 50 fingers pairs. (a) Schematic of area scanned with optical probe, (b) mode A: f = 30.9 MHz, (c) mode B: f = 54.8 MHz, (d) mode C: f = 89.2 MHz, (e) mode D: f = 116.1 MHz.
Out-of-plane mechanical displacement and the average displacement along HAR IDT for each mode of a W2 HAR IDT ( ) with and 10 fingers pairs. (a) Schematic of area scanned with optical probe, (b) mode E: f = 35.6 MHz, (c) mode F: f = 52.6 MHz, (d) mode G: f = 60 MHz, (e) mode H: f = 86.4 MHz, (f) mode I: f = 111.1 MHz.
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