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Vacuum ultraviolet emission from microwave Ar-H2 plasmas
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10.1063/1.4796134
/content/aip/journal/apl/102/11/10.1063/1.4796134
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/11/10.1063/1.4796134
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Experimental setup.

Image of FIG. 2.
FIG. 2.

Argon resonance lines emitted by pure Ar plasma.

Image of FIG. 3.
FIG. 3.

Detected VUV emission spectra of Ar-H2 plasmas for 5% and 30% of hydrogen in the mixture.

Image of FIG. 4.
FIG. 4.

Detected VUV emission spectrum of an Ar(50%)-H2(50%) plasma.

Image of FIG. 5.
FIG. 5.

Intensity of atomic hydrogen lines vs. the hydrogen percentage. Points are measurements. The bars represent the effects of self-absorption in the range of 10%–80% of the degree of dissociation.

Image of FIG. 6.
FIG. 6.

Electron density vs. the hydrogen percentage, for different pressures.

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/content/aip/journal/apl/102/11/10.1063/1.4796134
2013-03-19
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Vacuum ultraviolet emission from microwave Ar-H2 plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/11/10.1063/1.4796134
10.1063/1.4796134
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