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AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator
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10.1063/1.4798333
/content/aip/journal/apl/102/11/10.1063/1.4798333
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/11/10.1063/1.4798333
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The X-ray diffraction spectrum on Al/AlN/Al/Cr/diamond layered structure. (002) rocking curve FWHM = 0.32°.

Image of FIG. 2.
FIG. 2.

Measuring system for HBAR microwave acoustic properties testing.

Image of FIG. 3.
FIG. 3.

Resonant properties of Al/AlN/Al/Cr/diamond piezoelectric layered structure: (a) some microwave acoustic resonances in diamond substrate tested by S 11 delay mode close to 6 GHz; (b) a selected resonant curve at 7 GHz with Q = 12 722.

Image of FIG. 4.
FIG. 4.

Frequency dependences of the frequency difference between two nearest overtones Δf and Q factor for Al/AlN/Al/Cr/diamond piezoelectric layered structure.

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/content/aip/journal/apl/102/11/10.1063/1.4798333
2013-03-20
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: AlN/single crystalline diamond piezoelectric structure as a high overtone bulk acoustic resonator
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/11/10.1063/1.4798333
10.1063/1.4798333
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