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(002) ω scans of (a): Atemp (b): sample A, (c): Btemp and (d): sample B. The inset of (d) shows the residuals of Lorentz and Voigt fits with respect to experimental data.
RSMs of both symmetric (002) and asymmetric (105) reflections. (a): (002) plane and (b): (105) plane mappings of Atemp, and (c): (002) plane and (d): (105) plane mappings of sample A, and (e): (002) plane and (f): (105) plane mappings of sample B. The unit rlu is defined as λ/2d, and qx−y//, qz//.
Williamson–Hall plots for (00l) reflections of samples (a) A and (b) B. Note that (006) reflection of sample B is too weak to be detected in HRXRD mode, so only (002) and (004) are shown. But it will not influence the slope rand-size relationship of samples A and B.
GIXRD of sample A with different grazing incident angle αi. (a) ω-scan and (c) θ-2θ scan of (100) plane, αi = 0.2° ∼ 1.75°; the depth dependences of (b) the ω-scan FWHM and (d) the a-axis lattice parameter.
Sample B: the depth dependences of (a) (100) plane ω-scan FWHM and (b) a-axis lattice parameter; Btemp: (c) XPS depth profile of In3d and Ga2p and (d) the depth dependence of In/Ga ratio.
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