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Electrically integrated SU-8 clamped graphene drum resonators for strain engineering
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View: Figures


Image of FIG. 1.
FIG. 1.

((a)-(e)) Schematic of fabrication processes of SU-8 clamped graphene drum resonator. (f) False-color SEM image of graphene drum resonator with 30° tilt angle. Scale bar: 4 μm. (Inset: same device with 60° tilt angle showing the gap between the SU-8 clamped graphene and local gate).

Image of FIG. 2.
FIG. 2.

Resistance (R) as function of applied DC gate voltage (Vg ) for SU-8 clamped drum resonator (Black) and non-clamped graphene strip resonators (Red).

Image of FIG. 3.
FIG. 3.

Measurement setup and typical resonance plot for a drum resonator with 4 μm diameter. (a) Circuit-level schematic of direct detection measurement setup. (b) Typical resonance data taken at RT (black dots) and Lorentzian fit (red), both in logarithmic scale.

Image of FIG. 4.
FIG. 4.

Color plot of S21 as a function applied gate voltage (Vg ) and frequency for (a) SU-8 clamped graphene drum resonator and (b) graphene strip resonator. The yellow curve in (a) is a continuum mechanical model fit as described in the main text.

Image of FIG. 5.
FIG. 5.

Resonance and strain measurements of highly strain graphene resonator. (a) S21 measurement showing the resonance frequency of 260 MHz (b) Strain measurement with AFM nanoindentation showing load-displacement characteristic curve for SU-8 clamped graphene. The linear regime modeling indicates that the pre-strain of 0.4% due to SU-8.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Electrically integrated SU-8 clamped graphene drum resonators for strain engineering