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Periodically patterned columnar thin films as blazed diffraction gratings
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10.1063/1.4802975
/content/aip/journal/apl/102/16/10.1063/1.4802975
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/16/10.1063/1.4802975

Figures

Image of FIG. 1.
FIG. 1.

Cross-sectional SEM image of a 1100-nm-thick PP-CTF deposited on a 1D photoresist grating of 600-nm period. was evaporated to deposit the thin film. The prismatic (triangular) air cavities are clearly visible.

Image of FIG. 2.
FIG. 2.

Schematic of the PP-CTF as a blazed grating containing prismatic air cavities with base b, height h, and cavity angle . The photoresist grating is made of strips of height W and the period is denoted by d. The refractive indices of the different materials are indicated. n 1, n 2, and n 3 are the principal refractive indices of the columnar structure.

Image of FIG. 3.
FIG. 3.

(a)–(e) Calculated diffraction efficiency in transmission vs. diffraction angle ψ for a blazed grating with period d = 1125 nm for  nm, respectively. Diffraction angles (ψ) due to the periodic arrangement are identified by red lines, while the diffraction envelope is a green curve and the diffraction efficiency of each order is represented in black.

Tables

Generic image for table
Table I.

Measured and predicted (in parenthesis) diffraction efficiencies ( ) for unpolarized light diffracted through a PP-CTF with d = 1125 nm and d = 600 nm.

Generic image for table
Table II.

Measured and predicted (in parenthesis) diffraction efficiencies ( ) for s and p polarized light diffracted through a PP-CTF with d = 1125 nm.

Generic image for table
Table III.

Principal refractive indices at visible wavelengths.

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/content/aip/journal/apl/102/16/10.1063/1.4802975
2013-04-25
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Periodically patterned columnar thin films as blazed diffraction gratings
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/16/10.1063/1.4802975
10.1063/1.4802975
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