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Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Schematic of the device, where the defect implanted PhC cavity and the bus waveguide are vertically coupled through a buffer layer. An arbitrary PhC cavity is shown in the schematic for illustration purposes. The design of Ref. 9 is used in our experiment. (b) Theoretical plot of transmittance (T), reflectance (R), and optical loss (L) against ΓOC at resonance wavelength, using coupled mode theory.

Image of FIG. 2.
FIG. 2.

(a) Blue dashed curve shows the theoretical relationship between transmittance and optical loss of the system at resonance. Red dots show the measured photocurrents for five different detectors with different transmittances. (b) Optical spectra in the Si3N4 waveguide immediately after the PhC cavity (blue) and photocurrent at 0 V (in red) and −10 V (in yellow) for the device with transmittance of 0.30. The off-resonance optical power is taken from the transmitted power spectrum well away from the resonance.

Image of FIG. 3.
FIG. 3.

(a) Measured photocurrent spectra for different input optical power at 0 V reverse bias. (b) Measured photocurrent peaks as the absorbed optical power increases. The solid line corresponds to 7 mA/W responsivity and the dashed line shows the trend in photocurrent as the input power increases. (c) Measured photocurrent spectra for different applied reverse bias, when the input optical power is 55 μW. (d) Measured responsivity (red circle) at resonance and dark current (blue square) as the reverse bias increases.

Image of FIG. 4.
FIG. 4.

(a) Top view of the cascaded PhC cavity based detector set, where two cavities are coupled to a single silicon nitride waveguide. (b) Normalized transmission spectrum (blue) of the system and measured photocurrent from detector 1 (red) and detector 2 (yellow dashed).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths