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Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen doping
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10.1063/1.4775688
/content/aip/journal/apl/102/2/10.1063/1.4775688
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4775688
/content/aip/journal/apl/102/2/10.1063/1.4775688
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/content/aip/journal/apl/102/2/10.1063/1.4775688
2013-01-15
2014-12-27
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Improving dielectric properties of epitaxial Gd2O3 thin films on silicon by nitrogen doping
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4775688
10.1063/1.4775688
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