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Laser heating and detection of bilayer microcantilevers for non-contact thermodynamic measurements
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10.1063/1.4776197
/content/aip/journal/apl/102/2/10.1063/1.4776197
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4776197

Figures

Image of FIG. 1.
FIG. 1.

(a) Diagram of experimental apparatus with FEM results of a 1 μm × 5 μm BMC (W = 100 nm, MgO = 200 nm) heated by a 10 mW 1.0 μs laser pulse with a 1.0 μm spot diameter in vacuum. The FEM indicates a maximum heating rate of 1.2 ×  . (b) Optical microscope image of a 2 μm × 10 μm BMC with a 1.0 μm diameter heating laser focus. (c) Scanning electron microscope (SEM) image of a 2 μm × 10 μm BMC after aluminum sample deposition (1 μm × 1 μm × 50 nm). (d) Deflection noise density of a 2 μm × 10 μm BMC at room temperature in air (mass resolution of 2.67 fg (Ref. 10 )). (e) Maximum tip deflection of a 2 μm × 10 μm BMC for a 167 μs laser heating pulse at different optical powers in air.

Image of FIG. 2.
FIG. 2.

(a) Dynamic response of a 2 μm × 10 μm BMC to a 167 μs laser heating pulse at different optical powers in air. The response time of the PD is below 100 ns, and we observe a thermal time constant of 36 μs for the microcantilever. (b) We observe heating rates in air exceeding 3.0 ×  . Deflection peaks observed at the beginning and end of the laser heating pulse are attributed to ablation backpressure from the heating laser. 12–15

Image of FIG. 3.
FIG. 3.

(a) Resonant frequency shift of a 2 μm × 10 μm BMC due to tungsten ablation and oxidation after five cycles at 800 μW in air. (b) Optical microscope image of a 4 μm × 20 μm BMC before and after high power laser heating. (c) Cross section of FEM dynamic temperature results of a 2 μm × 10 μm BMC heated by a 167 μs 500 μW 1.0 μm spot laser pulse in air.

Tables

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Table I.

Comparison of experimental sample temperature to finite element modeling as a function of laser power in air and in vacuum. FEM in air considers h = 100 [W/( )].

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/content/aip/journal/apl/102/2/10.1063/1.4776197
2013-01-18
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser heating and detection of bilayer microcantilevers for non-contact thermodynamic measurements
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4776197
10.1063/1.4776197
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