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On the residual stress and fracture strength of crystalline silicon wafers
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10.1063/1.4776706
/content/aip/journal/apl/102/2/10.1063/1.4776706
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4776706
/content/aip/journal/apl/102/2/10.1063/1.4776706
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/content/aip/journal/apl/102/2/10.1063/1.4776706
2013-01-16
2014-09-03
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: On the residual stress and fracture strength of crystalline silicon wafers
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/2/10.1063/1.4776706
10.1063/1.4776706
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