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Micromachined piezoelectric microphones with in-plane directivity
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10.1063/1.4776687
/content/aip/journal/apl/102/5/10.1063/1.4776687
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/5/10.1063/1.4776687
/content/aip/journal/apl/102/5/10.1063/1.4776687
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/content/aip/journal/apl/102/5/10.1063/1.4776687
2013-02-07
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromachined piezoelectric microphones with in-plane directivity
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/5/10.1063/1.4776687
10.1063/1.4776687
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