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Optical image of a representative device, consisting of a ring resonator (bottom inset) coupled to a waveguide with a grating coupler (top inset) on input end and horn-coupler on the output end.
Schematic of experimental setup used to characterize our devices in transmission.
(a) Transmission measurement of device with coupling gap d = 300 nm, as fabricated. Ring resonances are highlighted with green to distinguish them from gas absorption dips (from atmospheric C13O2). (b) Device with d = 300 nm, after Piranha etch/HF cycling (Note: (a) and (b) are on same sample, but are not the same device.) Power transfer between the waveguide and the ring is greatly improved, and maximum loaded Q-factors have increased from 45 000 to 94 000, with a maximum intrinsic Q-factor of 127 000, shown in the inset.
Transmission measurement of device with d = 300 nm, fabricated using resist reflow and post-fabrication Piranha-HF cycling. The reflow results in higher Q-factors, with a maximum loaded Qt of 151 000 and intrinsic Q0 of 278 000, as shown in the inset.
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