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(a) Low-loss spectrum of AlN acquired from a nearly oxygen free region. (b) Comparison of the spectra from intrinsic AlN (blue), atmosphere (green), and O2 (red) annealed samples, with zero-loss peaks and plural scattering deconvoluted. The inset shows a TEM bright-field image of a-Al2O3 overlayers at the edge of an oxidized NP.
(a) Experimentally derived complex DFs (ε = ε 1 + i ε 2) of intrinsic (solid line) and oxidized (dashed line) AlN. (b) Computed DF according to the optically determined refractive index and extinction coefficient in Refs. 7 and 9 .
(a) Simulated low-loss spectra of a 60-nm bulk AlN slab with various thicknesses of a-Al2O3 overlayer. The schematic representation of the multilayer model utilized is also shown in the inset. (b) Calculated loss-probabilities of the respective bulk AlN and a-Al2O3 of the same 60 nm.
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