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Influence of surface oxidation on the valence electron energy-loss spectrum of wurtzite aluminum nitride
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10.1063/1.4790395
/content/aip/journal/apl/102/6/10.1063/1.4790395
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/6/10.1063/1.4790395
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Figures

Image of FIG. 1.
FIG. 1.

(a) Low-loss spectrum of AlN acquired from a nearly oxygen free region. (b) Comparison of the spectra from intrinsic AlN (blue), atmosphere (green), and O2 (red) annealed samples, with zero-loss peaks and plural scattering deconvoluted. The inset shows a TEM bright-field image of a-Al2O3 overlayers at the edge of an oxidized NP.

Image of FIG. 2.
FIG. 2.

(a) Experimentally derived complex DFs (ε = ε 1 + i ε 2) of intrinsic (solid line) and oxidized (dashed line) AlN. (b) Computed DF according to the optically determined refractive index and extinction coefficient in Refs. 7 and 9 .

Image of FIG. 3.
FIG. 3.

(a) Simulated low-loss spectra of a 60-nm bulk AlN slab with various thicknesses of a-Al2O3 overlayer. The schematic representation of the multilayer model utilized is also shown in the inset. (b) Calculated loss-probabilities of the respective bulk AlN and a-Al2O3 of the same 60 nm.

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/content/aip/journal/apl/102/6/10.1063/1.4790395
2013-02-11
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of surface oxidation on the valence electron energy-loss spectrum of wurtzite aluminum nitride
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/6/10.1063/1.4790395
10.1063/1.4790395
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