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Structure of epitaxial L10-FePt/MgO perpendicular magnetic tunnel junctions
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View: Figures


Image of FIG. 1.
FIG. 1.

Longitudinal-XRD scan from a 25 nm thick FePt layer grown under identical conditions as p-MTJs. (inset) FePt(002) reflection from a FePt(25 nm)/MgO(3 nm)/FePt(50 nm) sample, in which the doublet indicates that the top FePt layer is under higher tensile strain than the bottom layer.

Image of FIG. 2.
FIG. 2.

(a) Cross-sectional HRTEM image of the entire p-MTJ structure obtained along the MgO[1-10] direction. Power-spectra from regions denoted schematically by the red squares in (b) top FePt electrode, (c) MgO barrier, and (d) bottom FePt electrode. These power spectra show the L10-FePt(001)[110]//MgO(001)[110]//L10-FePt(001)[110] epitaxial relation and confirm the L10 structure of FePt electrodes. (e) HRTEM cross-sectional image of the FePt electrodes and MgO barrier. Inset (top right): power-spectrum from a region including the bottom electrode and barrier shows splitting of the (220) reflection, marked schematically by the red circle. Inset (center): reconstructed image of the semi-coherent interface between the bottom FePt electrode and MgO barrier using the (220) reflection in which misfit dislocations are marked schematically by the red arrow.

Image of FIG. 3.
FIG. 3.

(a) HAADF-STEM (inner detector semi-angle: 78 mrad) image demonstrating steps at the interface of the Pt seed-FePt bottom electrode (denoted schematically by red lines). (b) Image constructed from the power-spectrum of (a) using the FePt (002) reflection (perpendicular to growth direction), which highlights antiphase boundaries, as shown, for example, in the region of the red oval.

Image of FIG. 4.
FIG. 4.

(Left) Processed HAADF-STEM image of the FePt/MgO/FePt interfaces, inset: image simulation of an Fe-terminated interface and atomic-column steps at the interface between barrier and electrode. (Right) Intensity line scans along the Pt, Fe, and MgO crystallographic planes, marked schematically by the green rectangles in the HAADF-STEM image. The image intensity differences demonstrate two crystallographic planes (line scans #5 and #6), which cannot be attributed either to the FePt electrode or MgO barrier.

Image of FIG. 5.
FIG. 5.

(Left) Example of relative Fe and O composition across the bottom FePt/MgO interface (from the area of the dashed yellow rectangle, right) calculated using the Fe L and O K core-loss edges in EEL spectra when recording the HAADF-STEM image (right) using the "StripeSTEM" approach.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Structure of epitaxial L10-FePt/MgO perpendicular magnetic tunnel junctions