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Fabrication of nanopores in 1 nm thick carbon nanomembranes with slow highly charged ions
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Schematic of CNM fabrication: a SAM of aromatic molecules, here biphenyls, is formed on a surface and cross-linked by radiation. After the supporting substrate is dissolved, a CNM with the thickness of the monolayer, here 1 nm, is generated and transferred onto a metal grid. (b) HIM image of a CNM that is placed free-standing on a Cu grid with hexagonal 60 μm wide meshes. (c) High magnification HIM image showing a CNM suspending over an opening in the Cu grid.

Image of FIG. 2.
FIG. 2.

Pores in CNMs imaged with different microscopy techniques after irradiation with slow highly charged ions; (a) HIM image of pores induced by Xe40+ (Ekin = 180 keV) ions. (b) HIM image, Xe40+ (Ekin = 4 keV). (c) TEM overview image, Xe40+ (Ekin = 180 keV). (d) TEM image, Xe40+ (Ekin = 40 keV). (e) and (f) SEM images, Xe40+ (Ekin = 12 keV). (g) AFM amplitude image, Xe35+ (Ekin = 12 keV). (h) AFM height image (zoomed in from (g)). While the TEM images pores as bright spots, with all other techniques (HIM, SEM, and AFM), they appear as dark spots.

Image of FIG. 3.
FIG. 3.

Evolution of pore diameters in CNMs induced by slow HCIs as a function of ion potential energy: The pore diameter increases from threshold charge state (Xe25+), to highest available charge state (Xe40+) when the kinetic energy of the ions is left constant (40 keV). TEM images of single pores for these cases are displayed to illustrate the observed size increase.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of nanopores in 1 nm thick carbon nanomembranes with slow highly charged ions