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Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping
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10.1063/1.4793234
/content/aip/journal/apl/102/7/10.1063/1.4793234
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/7/10.1063/1.4793234
/content/aip/journal/apl/102/7/10.1063/1.4793234
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/content/aip/journal/apl/102/7/10.1063/1.4793234
2013-02-19
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/7/10.1063/1.4793234
10.1063/1.4793234
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