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Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping
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Image of FIG. 1.
FIG. 1.

Raman spectrum of studied CVD diamond film showing a strong peak at 1324 cm−1 and no sp2 carbon peak at 1600 cm−1. Other peaks near 520 cm−1 and 1200 cm−1 are due to silicon substrate and boron doping of the diamond film, respectively.

Image of FIG. 2.
FIG. 2.

SEM images of (a) the surface of the MCD film, illustrating the morphology and average grain size, and (b) a DETF resonator. A combination of AC and DC voltages are applied to the side electrodes to excite the DETF into vibration. w and L represent the width and length of the tines, respectively.

Image of FIG. 3.
FIG. 3.

Experimental measurement and 2nd order transfer function fit of the frequency response of a DETF resonator. This device exhibited the highest in-plane quality factor, Q = 81 646.

Image of FIG. 4.
FIG. 4.

Q versus frequency. (a) The yellow circles are measurements for tine width w = 3.3 μm, cyan diamonds correspond to w = 4.8 μm, solid lines correspond to the theoretical QTED using κ|| = 100 W m−1K−1, and dashed lines correspond to ±15% variation in QTED . (b) Data for both tine widths with frequencies normalized by fmin . The dashed-dotted orange line shows the theoretical anchor loss line, Qclamp . The four experimental points near f/f min  = 2 correspond to the asymmetric mode and have a Q that is in good agreement with the combination of Q TED and Q clamp .


Generic image for table
Table I.

Summary of MCD film properties.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping