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XRD spectra and SEM micrographs of a 3 C-SiC thin film grown on Si (111): (a) XRD spectra, (b) surface morphology, and (c) cross-section image.
Raman spectra of as-grown 3 C-SiC on Si (111), laser-illuminated spot on 3 C-SiC on Si (111), bare Si (111), and C60 powders. Inset shows the enlarged spectral region of the SiC phonons.
SEM micrographs of 3 C-SiC grown on Si (111): (a) sample A, (b)sample B, and (c) sample C.
SEM micrographs of laser-induced graphene from 3 C-SiC and corresponding Raman mapping images: (a) sample A, (b) sample B, and (c) sample C. Raman mapping range is 4 μm×4 μm with a spectral range of 2650–2750 cm−1.
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