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Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing element
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10.1063/1.4794074
/content/aip/journal/apl/102/9/10.1063/1.4794074
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/9/10.1063/1.4794074
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) 3-D schematic representation of the proposed micromechanical resonant thermal detector and its equivalent thermal circuit. (b) Scanning electron microscope (SEM) image of the fabricated micromechanical resonant thermal detector.

Image of FIG. 2.
FIG. 2.

FEM simulation of the thermal properties of the thermal detector: (a) Heat transfer efficiency between the heat absorber and resonator for different sizes of the air gap. (b) Temperature variation and thermal time constant for 1 μW input power for a 250 nm air gap device.

Image of FIG. 3.
FIG. 3.

Measured admittance curve and BVD fitting of the AlN nano-plate resonator. Q is the quality factor, kt 2 is the electromechanical coupling coefficient, C 0 is the device capacitance, Rm is the motional resistance.

Image of FIG. 4.
FIG. 4.

Measured resonance frequency shift of the device to different levels of input power applied to the nano-hot plate and extracted temperature rise of the AlN resonator.

Image of FIG. 5.
FIG. 5.

(a) Device admittance response (at 966.8 MHz) to different levels of square wave input power at 3 Hz to the heater. (b) Dynamic response of the device admittance amplitude (at 966.9 MHz) to an applied square wave power (14.5 μW) at 100 Hz to the heater. The inset shows the zoom-in device response from 15.5 ms to 17.5 ms, indicating a time constant of 350 μs.

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/content/aip/journal/apl/102/9/10.1063/1.4794074
2013-03-04
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing element
http://aip.metastore.ingenta.com/content/aip/journal/apl/102/9/10.1063/1.4794074
10.1063/1.4794074
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