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In situ study of atomic layer deposition Al2O3 on GaP (100)
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10.1063/1.4821779
/content/aip/journal/apl/103/12/10.1063/1.4821779
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/12/10.1063/1.4821779
/content/aip/journal/apl/103/12/10.1063/1.4821779
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/content/aip/journal/apl/103/12/10.1063/1.4821779
2013-09-19
2014-09-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ study of atomic layer deposition Al2O3 on GaP (100)
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/12/10.1063/1.4821779
10.1063/1.4821779
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