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We report on the natural source based and biodegradable material cellulose on Al O as ultrathin hybrid high- dielectric layer for applications in green electronics. Dielectric films of 16 nm cellulose ( ≈ 8.4) and 8 nm Al O ( ≈ 9) exhibit low leakage currents up to electric fields of 1.5 MV/cm. Pentacene and C based organic thin film transistors show a well-balanced performance with operation voltages around 2 V. They are implemented in complementary inverters with excellent switching behavior, a small-signal gain up to 60 and with exceptionally high and balanced noise margin values of 82% at ultralow operation voltage ( = 2.5 V).


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