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A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators
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Image of FIG. 1.
FIG. 1.

(a) Equivalent circuit of 4th-order filter with differential readout oftwo in-phase actuated resonators, including the motional capacitances, , , inductances, , , impedances, , , feed-through capacitances, , , and termination impedance, (b) Simplified model of the resonators for frequencies outside the passband of the resonator.

Image of FIG. 2.
FIG. 2.

Complex plane representation of two in-phase actuated resonators and subtracted outcome at center frequency ( ).

Image of FIG. 3.
FIG. 3.

(a) The simulation results of a 4th-order filter using subtracting of two 2nd-order resonators with slightly different resonances with and (b) the phase change of the resonators and illustration of the fact that at the center frequency of the filter.

Image of FIG. 4.
FIG. 4.

Scanning electron micrograph (SEM) of a 4th-order differential readout of in-phase actuated contour-mode PZT-on-silicon filter at 380 MHz.

Image of FIG. 5.
FIG. 5.

(a) The measured transmission of the resonators (S and S) and filter (S) with 50 Ω termination. (b) The measured phase change of the resonators.

Image of FIG. 6.
FIG. 6.

Measured transmission gain of the filter at different DC-bias voltages from 0–4 V with 1 V increments.


Generic image for table
Table I.

Material constants used in the calculations.

Generic image for table
Table II.

The resonator performances at DC-bias voltages of 0 and 4 V.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A 4th-order band-pass filter using differential readout of two in-phase actuated contour-mode resonators