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(a) Equivalent circuit of 4th-order filter with differential readout oftwo in-phase actuated resonators, including the motional capacitances, C m1, C m2, inductances, L m1, L m2, impedances, R m1, R m2, feed-through capacitances, C p1, C p2, and termination impedance, R s. (b) Simplified model of the resonators for frequencies outside the passband of the resonator.
Complex plane representation of two in-phase actuated resonators and subtracted outcome at center frequency (f c).
(a) The simulation results of a 4th-order filter using subtracting of two 2nd-order resonators with slightly different resonances with and (b) the phase change of the resonators and illustration of the fact that at the center frequency of the filter.
Scanning electron micrograph (SEM) of a 4th-order differential readout of in-phase actuated contour-mode PZT-on-silicon filter at 380 MHz.
(a) The measured transmission of the resonators (S21 and S43) and filter (Sdc21) with 50 Ω termination. (b) The measured phase change of the resonators.
Measured transmission gain of the filter at different DC-bias voltages from 0–4 V with 1 V increments.
Material constants used in the calculations.
The resonator performances at DC-bias voltages of 0 and 4 V.
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