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Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes
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10.1063/1.4831988
/content/aip/journal/apl/103/20/10.1063/1.4831988
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/20/10.1063/1.4831988
/content/aip/journal/apl/103/20/10.1063/1.4831988
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/content/aip/journal/apl/103/20/10.1063/1.4831988
2013-11-15
2014-10-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Monolithic ultrasonic integrated circuits based on micromachined semi-ellipsoidal piezoelectric domes
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/20/10.1063/1.4831988
10.1063/1.4831988
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