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Surface transfer doping of diamond by MoO3: A combined spectroscopic and Hall measurement study
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10.1063/1.4832455
/content/aip/journal/apl/103/20/10.1063/1.4832455
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/20/10.1063/1.4832455

Figures

Image of FIG. 1.
FIG. 1.

Energy band diagram showing the surface transfer doping process in hydrogen-terminated diamond using MoO as a surface acceptor. The energy levels are measured by PES and the detailed procedure used for this process is described elsewhere. 9 In the energy band diagram, IP represents ionization potential, EA represents electron affinity, and WF represents work function.

Image of FIG. 2.
FIG. 2.

(a) PES core level spectra of C1 with photon energy of 350 eV. (b) Secondary electron emission cut-off with photon energy of 60 eV for hydrogen-terminated diamond with increasing MoO coverage. The diamond C 1 peak position and work function value (extracted from the cut-off position in (b) as a function of MoO coverage are plotted in (c) and (d), respectively. (e) PES core level spectra of Mo 3 with photon energy of 350 eV. An example of the least square peak fitting for the Mo 3 peaks is shown for 4 Å coverage of MoO.

Image of FIG. 3.
FIG. 3.

Fabrication process for Van der Pauw Hall measurement structures: 1. Diamond surface hydrogen-termination, 2. deposition of 80 nm thick Au layer, 3. electrical isolation via Au etch and O plasma, 4. Au etch for VDP ‘active’ region and ohmic contact formation, 5. completed VDP structure, 6. 400 °C anneal, and 7. deposition of 100 nm thick MoO layer.

Tables

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Table I.

VDP measurements prior to and post MoO deposition.

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/content/aip/journal/apl/103/20/10.1063/1.4832455
2013-11-14
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface transfer doping of diamond by MoO3: A combined spectroscopic and Hall measurement study
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/20/10.1063/1.4832455
10.1063/1.4832455
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