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Energy band diagram showing the surface transfer doping process in hydrogen-terminated diamond using MoO3 as a surface acceptor. The energy levels are measured by PES and the detailed procedure used for this process is described elsewhere. 9 In the energy band diagram, IP represents ionization potential, EA represents electron affinity, and WF represents work function.
(a) PES core level spectra of C1s with photon energy of 350 eV. (b) Secondary electron emission cut-off with photon energy of 60 eV for hydrogen-terminated diamond with increasing MoO3 coverage. The diamond C 1s peak position and work function value (extracted from the cut-off position in (b) as a function of MoO3 coverage are plotted in (c) and (d), respectively. (e) PES core level spectra of Mo 3d with photon energy of 350 eV. An example of the least square peak fitting for the Mo 3d peaks is shown for 4 Å coverage of MoO3.
Fabrication process for Van der Pauw Hall measurement structures: 1. Diamond surface hydrogen-termination, 2. deposition of 80 nm thick Au layer, 3. electrical isolation via Au etch and O2 plasma, 4. Au etch for VDP ‘active’ region and ohmic contact formation, 5. completed VDP structure, 6. In-situ 400 °C anneal, and 7. deposition of 100 nm thick MoO3 layer.
Ex-situ VDP measurements prior to and post MoO3 deposition.
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