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Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN
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10.1063/1.4833836
/content/aip/journal/apl/103/22/10.1063/1.4833836
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/22/10.1063/1.4833836
/content/aip/journal/apl/103/22/10.1063/1.4833836
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/content/aip/journal/apl/103/22/10.1063/1.4833836
2013-11-26
2015-08-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of N2 and forming gas plasma exposure on the growth and interfacial characteristics of Al2O3 on AlGaN
http://aip.metastore.ingenta.com/content/aip/journal/apl/103/22/10.1063/1.4833836
10.1063/1.4833836
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