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1.
1. K. Niemi, S. Reuter, L.M. Graham, J. Waskoenig, and T. Gans, Appl. Phys. Lett. 95, 151504 (2009).
http://dx.doi.org/10.1063/1.3242382
2.
2. K. Niemi, S. Reuter, L.M. Graham, J. Waskoenig, N. Knake, V. Schulz-von der Gathen, and T. Gans, J. Phys. D: Appl. Phys. 43, 124006 (2010).
http://dx.doi.org/10.1088/0022-3727/43/12/124006
3.
3. P. A. Delattre, T. Lafleur, E. Johnson, and J.P. Booth, J. Phys. D: Appl. Phys. 46, 235201 (2013).
http://dx.doi.org/10.1088/0022-3727/46/23/235201
4.
4. A. Greb, K. Niemi, D. O'Connell, G.J. Ennis, N. MacGearailt, and T. Gans, Phys. Plasmas 20, 053502 (2013).
http://dx.doi.org/10.1063/1.4804280
5.
5. G. J. M. Hagelaar and L.C. Pitchford, Plasma Sources Sci. Technol. 14, 722 (2005).
http://dx.doi.org/10.1088/0963-0252/14/4/011
6.
6. P. A. Miller, G.A. Hebner, K.E. Greenberg, P.D. Pochan, and B.P. Aragon, J. Res. Natl. Inst. Stand. Technol. 100, 427 (1995).
http://dx.doi.org/10.6028/jres.100.032
7.
7. Y. Sakiyama and D.B. Graves, J. Appl. Phys. 101, 073306 (2007).
http://dx.doi.org/10.1063/1.2715745
8.
8. Y. P. Raizer and M.N. Shneider, High Temp. 29, 833 (1991).
9.
9. J. Waskoenig, K. Niemi, N. Knake, L.M. Graham, S. Reuter, V. Schulz-von der Gathen, and T. Gans, Plasma Sources Sci. Technol. 19, 045018 (2010).
http://dx.doi.org/10.1088/0963-0252/19/4/045018
10.
10. D. S. Stafford and M.J. Kushner, J. Appl. Phys. 96, 2451 (2004).
http://dx.doi.org/10.1063/1.1768615
11.
11. S. G. Belostotsky, D. Economou, D. Lopaev, and T. Rakhimova, Plasma Sources Sci. Technol. 14, 532 (2005).
http://dx.doi.org/10.1088/0963-0252/14/3/016
12.
12. H. M. Katsch, T. Sturm, E. Quandt, and H.F. Döbele, Plasma Sources Sci. Technol. 9, 323 (2000).
http://dx.doi.org/10.1088/0963-0252/9/3/310
13.
13. J. T. Gudmundsson, A.M. Marakhtanov, K.K. Patel, V.P. Gopinath, and M.A. Liebermann, J. Phys. D: Appl. Phys. 33, 3010 (2000).
http://dx.doi.org/10.1088/0022-3727/33/22/22
14.
14. B. F. Gordiets, C.M. Ferreira, V.L. Guerra, J. M. A.H. Loureiro, J. Nahorny, D. Pagnon, M. Touzeau, and M. Vialle, IEEE Trans. Plasma Sci. 23, 750 (1995).
http://dx.doi.org/10.1109/27.467998
15.
15. R. L. Sharpless and T.G. Slanger, J. Chem. Phys. 91, 7947 (1989).
http://dx.doi.org/10.1063/1.457211
16.
16. S. M. Newman, A.J. Orr-Ewing, D.A. Newnham, and J. Ballard, J. Phys. Chem. A 104, 9467 (2000).
http://dx.doi.org/10.1021/jp001640r
17.
17. K. Niemi, J. Waskoenig, N. Sadeghi, T. Gans, and D. O'Connell, Plasma Sources Sci. Technol. 20, 055005 (2011).
http://dx.doi.org/10.1088/0963-0252/20/5/055005
18.
18. M. Shibata, N. Nakano, and T. Makabe, J. Appl. Phys. 80, 6142 (1996).
http://dx.doi.org/10.1063/1.363649
19.
19. C. Küllig, K. Dittmann, and J. Meichsner, Plasma Sources Sci. Technol. 19, 065011 (2010).
http://dx.doi.org/10.1088/0963-0252/19/6/065011
20.
20. S. V. Berezhnoj, C.B. Shin, U. Buddemeier, and I. Kaganovich, Appl. Phys. Lett. 77, 800 (2000).
http://dx.doi.org/10.1063/1.1306637
21.
21. T. Gans, D. O'Connell, V. Schulz-von der Gathen, and J. Waskoenig, Plasma Sources Sci. Technol. 19, 034010 (2010).
http://dx.doi.org/10.1088/0963-0252/19/3/034010
22.
22. H. M. Katsch, A. Tewes, E. Quandt, A. Goehlich, T. Kawetzki, and H.F. Döbele, J. Appl. Phys. 88, 6232 (2000).
http://dx.doi.org/10.1063/1.1315332
23.
23. A. Goehlich, T. Kawetzki, and H.F. Döbele, J. Chem. Phys. 108, 9362 (1998).
http://dx.doi.org/10.1063/1.476388
24.
24. A. Salabas and R.P. Brinkmann, Jpn. J. Appl. Phys., Part 1 45, 5203 (2006).
http://dx.doi.org/10.1143/JJAP.45.5203
25.
25. D. L. Flamm and V.M. Donnelly, J. Appl. Phys. 59, 1052 (1986).
http://dx.doi.org/10.1063/1.336541
26.
26. E. Gogolides, J.P. Nicolai, and H.H. Sawin, J. Vac. Sci. Technol. A 7, 1001 (1989).
http://dx.doi.org/10.1116/1.576219
27.
27. J. P. Boeuf, Phys. Rev. A 36, 2782 (1987).
http://dx.doi.org/10.1103/PhysRevA.36.2782
28.
28. M. Yan, A. Bogaerts, R. Gijbels, and W.J. Goedheer, J. Appl. Phys. 87, 3628 (2000).
http://dx.doi.org/10.1063/1.372392
29.
29. D. O'Connell, T. Gans, E. Semmler, and P. Awakowicz, Appl. Phys. Lett. 93, 081502 (2008).
http://dx.doi.org/10.1063/1.2972117
30.
30. K. Dittmann, C. Küllig, and J. Meichsner, Plasma Phys. Control. Fusion 54, 124038 (2012).
http://dx.doi.org/10.1088/0741-3335/54/12/124038
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/content/aip/journal/apl/103/24/10.1063/1.4841675
2013-12-09
2016-12-11

Abstract

Plasma parameters anddynamics incapacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration,electronegativity, spatial distribution of particle densities as well as the ionizationdynamics aresignificantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulatedsurface conditionsare compared to experiments in the plasma-surface interface region using phase resolved opticalemission spectroscopy. It is demonstrated how measurements of excitationfeatures can be used to determine SDO surface loss probabilities for different surface materials.

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