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The influence of surface properties on the plasma dynamics in radio-frequency drivenoxygen plasmas: Measurements and simulations
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Plasma parameters anddynamics incapacitively coupled oxygen plasmas are investigated for different surface conditions. Metastable species concentration,electronegativity, spatial distribution of particle densities as well as the ionizationdynamics aresignificantly influenced by the surface loss probability of metastable singlet delta oxygen (SDO). Simulatedsurface conditionsare compared to experiments in the plasma-surface interface region using phase resolved opticalemission spectroscopy. It is demonstrated how in-situ measurements of excitationfeatures can be used to determine SDO surface loss probabilities for different surface materials.
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